DOI: 10.1109/TMTT.2024.3373870   IEEEXplore: https://ieeexplore.ieee.org/document/10477398

Silicon-Micromachined Waveguide MEMS Crossover Switch with Electrostatic Push-pull Actuators

220 - 260 GHz

The four-port crossover switch comprises two hybrid couplers and two microelectromechanical (MEMS-based) single pole single throw (SPST) switches integrated in silicon micromachined waveguides.

Sophisticated switching circuits, redundant switching applications.

>29.3 dB isolation in crossover state, >29.0 dB straight state 0.9-1.4 dB insertion loss in crossover state, 0.8-1.3 dB straight state >14.0 dB return loss in crossover state, >13.6 dB in straight state >13.7 dB input-input isolation in crossover state, >34 dB in straight state 5.6 x 5.0 x 1.2 mm package including four WR-3.4 waveguide ports