This article describes the design, fabrication and testing of an optical readout two-layer stacked metamaterial array detection chip that operates near the atmospheric window of 0.22 THz. The upper chip combines with metamaterial cantilever pixels to perform sensing and execution functions, and the lower chip performs auxiliary and support functions. Incident THz radiation is absorbed and converted to mechanical energy of pixels, then read out by the optical system. The compact stacked chip design improves the radiation–thermal–mechanical sensitivity performance of the chip. The chip has high 97% absorptivity and fast millisecond response time, and potentially supports a wide range of testing, imaging, and communication applications.