DOI: 10.1109/TMTT.2025.3610182   IEEEXplore: https://ieeexplore.ieee.org/document/11178111

Miniaturized first-order anti-symmetric (A1) mode acoustic resonators and filters utilizing inverted T-shaped electrodes (ITEs) based on a Z-cut LiNbO3/Si substrate.

5.245 GHz

The proposed inverted T-shaped electrode (ITE) structure with a double-layer electrode decouples the mass loading from the electric excitation boundary enabling an increased metallic ratio (MR) while avoiding spurious modes. This design increases the static capacitance density significantly and also increases the power handling ability compared to single-layer electrodes (SLEs).

RF front end modules with high performance resonator and filter requirements such as high coupling coefficients and quality factors for 6G wireless networks.

Up to 95.8% increase in static capacitance density compared to a SLE ; About 4 dB increase in power handling ability; About 50% reduction in device area (51.4% and 53.8% for the designs presented).