DOI: 10.1109/TMTT.2024.3423407   IEEEXplore: https://ieeexplore.ieee.org/document/10597595

Movable step impedance resonator (SIR) in coplanar waveguide (CPW) technology

0.5 – 5.0 GHz for this work

The sensor is versatile and capable of detecting proximity and measuring vertical and transverse displacements, velocities and angular motion. In a chain, the sensor is also capable of measuring medium to long displacements based on pulse counting of the phase-modulated signal generated in the reflection coefficient by the motion of the SIR chain. In a sandwich, the sensor has the potential to measure pressure. The sensor can also potentially determine the thickness and dielectric constant of thin dielectric films or slabs, and this possibility is left for future work.

Liquid sensing, motion sensing, biosensing and wearables.

3722 °/mm maximum sensitivity, 0.01 mm resolution, <0.1 cm dynamic range.