This article investigates the fragile nature of THz integrated silicon unclad substrateless devices and the potential to improve physical robustness with several novel approaches. Subwavelength slot-waveguide couplers replace exposed tapered input couplers with similar performance and less fragility. A localized field null at the point of contact with the solid supporting beam allows for more a robust support structure that does not disturb the guided waves. These two ruggedizing approaches combined impose an approximate 31% 3 dB relative bandwidth limit compared to the roughly 40% bandwidth limit of the more fragile tapered couplers. In the 300 GHz absorption window, the bandwidth impact is of no consequence.